发明名称 LASER PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To solve problems, for example, in a processing device using line beam laser in which laser beam is transmitted by an optical fiber and generated by an optical system, a waveguide and a homogenizer are needed for making the line beam uniform, therefore results in complication of a structure and high cost, and in light focus using a high magnification object lens, length of the line beam is limited.SOLUTION: Clads of terminal end parts of optical fibers 3 of plural laser sources 2 are subjected to etching, for making intervals of cores narrow, and line beam is made uniform, by expansion of laser beam by an NA of the beam passing the optical fibers 3 and light focus of a cylindrical lens, so that long line beam is made and it is possible to radiate a wide range, in a laser processing device.
申请公布号 JP2015199117(A) 申请公布日期 2015.11.12
申请号 JP20140090668 申请日期 2014.04.08
申请人 PRODUCT SUPPORT:KK 发明人 YAMADA KAZUO;INOUE KAZUHISA
分类号 B23K26/073;B23K26/064;H01L21/268 主分类号 B23K26/073
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