RADIATION IMAGING APPARATUS, METHOD OF MANUFACTURING THE SAME AND RADIATION IMAGING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a radiation imaging apparatus which allows a frame to be narrowed while maintaining uniformity of a structure and layer thickness distribution in a peripheral part of a scintillator layer.SOLUTION: A method of manufacturing a radiation imaging apparatus comprises the steps of: arranging a mask on a base so as to regulate a region on the base where a scintillator layer should be formed; forming the scintillator layer on the base and the mask; removing a part of the scintillator layer formed on the base by removing the mask from the base; connecting a support substrate for supporting the scintillator layer to the side opposite to the side of the base of the scintillator layer via an adhesion layer; peeling the base from the scintillator layer; and connecting a sensor panel to the side opposite to the side of the support substrate of the scintillator layer.