| 摘要 |
PROBLEM TO BE SOLVED: To provide a motor capable of transmitting the rotation of an improved resonant frequency while maintaining sealability for separating two spaces of different pressures, a transport device and a semiconductor manufacturing device.SOLUTION: The motor includes: a first angle feedback shaft coupled with a first motor rotor while being supported at the radial inner side of a housing in a rotatable manner; a first rotary vacuum seal member for sealing a gap between the first angle feedback shaft and the housing; a second angle feedback shaft coupled with a second motor rotor while being supported rotatably between the housing and the first angle feedback shaft in the radial direction; and a second rotary vacuum seal member for sealing a gap between the second angle feedback shaft and the housing. |
