FLYING SENSOR HEAD

摘要

The present disclosure provides a system and method of optical inspection of substrates that have relative large variations in topography. The present disclosure provides a system wherein optical components of the optical inspection system can be automatically moved vertically towards or away from the substrate during optical inspection of the substrate. The system moves the optics in a controlled and precise manner, thereby enabling accurate on-the-fly inspection of substrates having a large variation in topography.

主权项

1. An optical system comprising:
a substrate stage configured to support a substrate during inspection; an optics assembly including a sensor head positioned above the substrate stage, the sensor head including:
a movable mounting structure configured to be raised and lowered;at least one optical component mounted to the movable mounting structure that is configured to direct a laser beam towards the substrate stage;an electronically controlled actuator connected to the movable structure and configured to raise and lower the sensor head relative to the substrate stage; anda mass support device connected to the movable structure configured to support at least a portion of the weight of the movable mounting structure.