发明名称 POLISHING TOOL
摘要 PROBLEM TO BE SOLVED: To provide a polishing tool capable of improving retentivity to an abrasive grain which is used for polishing processing, thereby improving polishing efficiency, enhancing durability, and improving work efficiency.SOLUTION: A polishing tool 1 polishes an object to be polished by supplying a polishing slurry in which abrasive grains are dispersed, between it and the object to be polished, and comprises a polishing layer 2 which is a lamination structure formed by laminating a mesh sheet formed of metal or resin fiber on a surface side, and the mesh sheet impregnates resin.
申请公布号 JP2015199170(A) 申请公布日期 2015.11.12
申请号 JP20140079676 申请日期 2014.04.08
申请人 RITSUMEIKAN;TOOL BANK:KK 发明人 TANI YASUHIRO;KIRINO CHUJI
分类号 B24B37/24;B24B37/22;H01L21/304 主分类号 B24B37/24
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