| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique which, when a complicated shape is formed on a processing object, enabling a timing for finishing processing to be detected with high precision by tracking a three-dimensional shape change of the processing object during processing.SOLUTION: A processing object 10 during processing is irradiated with white light, the intensity of reflection light L2 reflecting on the surface of the processing object is dispersed and detected, and an optical feature quantity (Ψ,&Dgr;) is calculated using spectral data. An optical feature quantity closest to the calculated optical feature quantity (Ψ,&Dgr;) is searched for from among a library 74, and a three-dimensional shape feature quantity (&thetas;1,&thetas;2,w,h,r) corresponding to a real processing progress state is obtained. The three-dimensional shape feature quantity (&thetas;1, &thetas;2, w, h, r) corresponding to the present and actual processing progress state is compared with a final ideal shape three-dimensional feature quantity (&thetas;1, &thetas;2,w, h, r), and when the difference between them is within the prescribed range or less, the processing of the processing object is finished. |
