| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma CVD device enabled to suppress the occurrence of an abnormal discharge due to the fact that parts for playing the role of a conductor wire for supplying an electric power source are deformed by thermal expansion.SOLUTION: A plasma CVD device 1 comprises: a connection member 4 connecting a power-receiving electrode 2 and a power feeding electrode 3 and having a heat deformation absorption part 5 for absorbing the deformation of the connection member 4 at the time of a thermal expansion; first insulators 6 for insulating the power-receiving electrode 2 and the power feeding electrode 3 electrically; and second insulators 7 having support parts 8 for supporting the individual base end parts 2a and 3a of the power-receiving electrode 2 and the power feeding electrode 3 and connected in a socket and spigot joint to the first insulators 6. |
