Polymerized Metal-Organic Material for Printable Photonic Devices

摘要

To manufacture a nanophotonic device, a metal oxide precursor is mixed with an organic acid, an organic polymer and a photoinitiator in a solvent to form a dispersion comprising a hybrid organic-inorganic phase. A film is formed on a substrate form the dispersion, the film including the hybrid organic-inorganic phase. The film is annealed to transform the hybrid organic-inorganic phase into an inorganic phase.

主权项

1. A method comprising:
mixing a metal oxide precursor with an organic acid to form a hybrid organic-inorganic phase; mixing the hybrid organic-inorganic phase with a photoinitiator and a solvent to form a dispersion comprising the hybrid organic-inorganic phase; forming a film on a substrate from the dispersion, the film comprising the hybrid organic-inorganic phase; and annealing the film to transform the hybrid organic-inorganic phase into an inorganic phase.