| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact conveyance apparatus which prevents deflection in a central part of a thin-plate-like workpiece during conveyance by a simple constitution.SOLUTION: A non-contact conveyance apparatus conveys a thin-plate-like workpiece, which has a non-product quality area in a peripheral edge part and has a product quality area inside the non-product quality area, in a non-contact state to the product quality area. The apparatus comprises: holding means for holding a thin-plate-like workpiece; and conveyance means for conveying the thin-plate-like workpiece by moving the holding means. The holding means has gripping means for gripping at least non-product quality areas of the peripheral edge parts, which oppose to each other, of the peripheral edge part of the thin-plate-like workpiece by plural numbers for each peripheral edge part. The gripping means is provided with an energizing mechanism which energizes the gripping means, which oppose to each other, in separating directions. |
