| 摘要 |
Provided is a pressure sensor unit (40) equipped with: a MEMS pressure sensor (1), which has a space (21) on the pressure detection surface-side of a diaphragm (2), has the diaphragm (2) to detect pressure using the pressure detection surface that faces the space (21), and outputs an electric signal corresponding to the detected pressure; and a pad (11), which supports the MEMS pressure sensor (1) and is placed in contact with an area to be measured, the pad (11) having a space (22) that communicates with the space (21) and is larger than the space (21). When the pressure sensor unit (40) is placed on an area to be measured, the spaces (21, 22) are sealed to become sealed spaces and the MEMS pressure sensor (1) detects pressure by transmitting the pressure of the area being measured to the diaphragm (2) of the MEMS pressure sensor (1) via the spaces (21, 22). |
