发明名称 SEMICONDUCTOR APPARATUS, METHOD FOR FABRICATING THE SAME, AND VARIABLE RESISTIVE MEMORY DEVICE
摘要 A semiconductor apparatus that includes a semiconductor substrate and a plurality of pillars formed in the semiconductor substrate. Each of the plurality of pillars includes a first pillar, and a second pillar formed on the first pillar, wherein the second pillar has a smaller linewidth than the first pillar.
申请公布号 US2015325695(A1) 申请公布日期 2015.11.12
申请号 US201414329555 申请日期 2014.07.11
申请人 SK hynix Inc. 发明人 SUH Jun Kyo;CHOI Kang Sik
分类号 H01L29/78;H01L29/66;H01L27/24 主分类号 H01L29/78
代理机构 代理人
主权项 1. A semiconductor apparatus comprising: a semiconductor substrate; and a plurality of pillars formed in the semiconductor substrate, wherein each of the plurality of pillars includes a first pillar, and a second pillar formed on the first pillar, wherein the second pillar has a smaller linewidth than the first pillar.
地址 Gyeonggi-do KR