POLARIZATION MEASURING DEVICE, LITHOGRAPHY APPARATUS, MEASURING ARRANGEMENT, AND METHOD FOR POLARIZATION MEASUREMENT

摘要

A polarization measuring device (10) for determining the polarization of a light beam (16, 46) that includes a reflector (12, 58) and a detector (14, 20). The reflector (12, 58) is configured such that the plane of incidence of the light rays in the light beam (16, 46) varies in a location-dependent manner, such that the reflector (12, 58) reflects differing polarization components of the light beam (16, 46) to different extents depending on the plane of incidence. The detector (14, 20) serves to detect the differing polarization components.

主权项

1. Polarization measuring device for determining polarization of a light beam, comprising:
a reflector configured to reflect the light beam, wherein the reflector is configured such that a plane of incidence of light rays in the light beam varies in dependence on a location of the incidence, such that the reflector reflects differing polarization components of the light beam to different extents depending on the plane of incidence of the light rays; and a detector configured to detect the differing polarization components.