| 摘要 |
Disclosed are a method for coating a diamond crystal film and an equipment therefor. The method for coating a diamond crystal film comprises the following steps: cleaning a substrate; opening a working chamber of the coating equipment, and clamping the substrate onto a coating frame of the coating equipment; closing the working chamber and vacuumizing; preheating a target to 300-500°C, the preheating time being 1-2 min; starting an ion source, and ion cleaning the substrate, the cleaning time being 3-5 min; coating the substrate; naturally decreasing the temperature of the working chamber to 60°C, releasing vacuum, opening the working chamber, and taking down the substrate. In the invention, a lanthanide is used as the target, and a resistive heating evaporation is used for coating on a glass substrate, so that the scratch resistant ability of a glass surface can be improved to 8H or more, and the hardness of the glass surface is enabled to reach the grade of a natural gem, not only increasing the product life, but also compensating for the defects of sapphires that the softness is not high and they are easily to broken up, while the cost is also greatly reduced. |
