发明名称 SUPER CONFORMAL PLATING
摘要 A method for at least partially filling a feature on a workpiece includes electrochemically depositing a metallization layer on a seed layer formed on a workpiece using a plating electrolyte having at least one plating metal ion, a pH range of about 6 to about 13, an organic additive, and first and second metal complexing agents.
申请公布号 WO2015172089(A1) 申请公布日期 2015.11.12
申请号 WO2015US30000 申请日期 2015.05.08
申请人 APPLIED MATERIALS, INC. 发明人 PABELICO, CHRIS;SHAVIV, ROEY;KLOCKE, JOHN L.;EMESH, ISMAIL, T.
分类号 H01L21/205 主分类号 H01L21/205
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