发明名称 デバイス製造方法
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a device in which a circuit is formed on a resin film more inexpensively and with higher producibility than before. <P>SOLUTION: This method for manufacturing a device includes: a step of applying a liquid polyimide resin composition onto a carrier substrate and drying the resultant coating film to form a solid polyimide resin film on the carrier substrate; a step of forming a circuit on the polyimide resin film; and a step of peeling the polyimide resin film in which a circuit is formed from the carrier substrate, in which the liquid polyimide resin composition contains a polyimide resin containing a repeating unit represented by Formula (1) (where R<SP POS="POST">1</SP>represents a divalent organic group), and a solvent. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5811492(B2) 申请公布日期 2015.11.11
申请号 JP20110102530 申请日期 2011.04.28
申请人 三菱化学株式会社 发明人 白井 智子;杉山 二郎
分类号 C08G73/10;H01L23/14;H01L51/46 主分类号 C08G73/10
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