METHOD FOR ANALYSING A SAMPLE

摘要

A method and an arrangement for analyzing a specimen, wherein the specimen is supported so as to be rotatable around an axis of rotation and displaceable in all three spatial directions and is illuminated by a first illumination device. Light radiated from the specimen is imaged on a detection device. A plurality of sectional images of the specimen are recorded at different settings of the rotational angle, and the specimen is rotated. The recorded sectional images are fused to form a data set of spatial image data of the specimen. The specimen is then illuminated by a second illumination device perpendicular to the axis of rotation, wherein a plurality of shadow images of the specimen are recorded and the specimen is rotated. A second data set of spatial image data of the specimen is constructed from the recorded shadow images by means of a back projection algorithm.