| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an energy beam irradiation system, capable of dramatically improving throughput and efficiently using an energy beam.SOLUTION: An energy beam irradiation system comprises: an energy beam emission mechanism; and a workpiece holder for conveying a workpiece between a predetermined workpiece transfer region and irradiation region. The workpiece transfer region is provided in two places interposing an ion beam. A first workpiece holder for conveying the workpiece is provided between one workpiece transfer region and the irradiation region, and a second workpiece holder for conveying a workpiece is provided between the other workpiece transfer region and the irradiation region. Each workpiece holder can hold a plurality of workpieces. A first workpiece placing part and second workpiece placing part are provided to interpose the ion beam and a third workpiece placing part is provided between the respective workpiece placing parts. First and third conveyance members for conveying the workpiece are provided between the first and third work-piece placing parts in the one workpiece transfer region, and second and fourth conveyance members for conveying a workpiece are provided between the second and third workpiece placing parts in the other workpiece transfer region.</p> |
