| 发明名称 |
COMPOSITIONS AND PROCESS FOR PHOTOLITHOGRAPHY |
| 摘要 |
<p>Overcoating layer compositions are provided that are applied above a photoresist composition including for immersion lithography processing as well as non-immersion imaging.</p> |
| 申请公布号 |
EP2942668(A1) |
申请公布日期 |
2015.11.11 |
| 申请号 |
EP20150171505 |
申请日期 |
2007.03.09 |
| 申请人 |
ROHM AND HAAS ELECTRONIC MATERIALS LLC |
发明人 |
GALLAGHER, MICHAEL K.;WANG, DEYAN |
| 分类号 |
G03F7/11;G03F7/004;G03F7/039;G03F7/095;G03F7/20 |
主分类号 |
G03F7/11 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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