| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent fine dusts or the like from mixing into a master mold when manufacturing the master mold, and to suppress the occurrence of failure in the master mold in a master mold manufacturing apparatus and a master mold manufacturing method which are provided wit a plurality of projections comprising molding materials cured on a surface of a planar substrate, and manufacture the master mold by repeatedly using the mold. <P>SOLUTION: The master mold manufacturing apparatus 1 includes: a mold holding part 7 which holds a mold M1 equipped with a recess M3 for forming the projection W2 so that the recess M3 faces upward, and moves/positions the held mold M1 in a horizontal direction; and a substrate holding part 9 which holds the substrate W1 above the mold M1 held by the mold holding part 7 so that a surface in which the projection W2 is formed faces downward, and vertically moves/positions the held substrate W1 relatively to the mold M1 held by the mold holding part 7. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
