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发明名称
晶粒射出装置
摘要
申请公布号
TWI508220
申请公布日期
2015.11.11
申请号
TW102127399
申请日期
2013.07.31
申请人
细美事有限公司
发明人
李喜澈;林锡泽
分类号
H01L21/687
主分类号
H01L21/687
代理机构
代理人
洪澄文 台北市南港区三重路19之6号2楼
主权项
一种用于将复数个晶粒自该等晶粒连附所至之一切割胶带射出的晶粒射出装置,该晶粒射出装置包括:一射出单元,选择性地抬起其中一该等晶粒,以射出该选定晶粒;一托座,具有一内部空间,其包含有该射出单元,且包括一上方嵌板,其具有至少一贯穿孔,以容许该射出单元垂直地运动通过,及一外壳,自该上方嵌板朝下方延伸且具有一下方开口;一驱动单元,与该射出单元相连接,以使该射出单元沿一垂直方向运动;及一本体,插入该托座之下方开口中且包含有该驱动单元,其中该托座与该本体系藉使用一磁力而互相连结。
地址
南韩
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