| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately detect, in a liquid processing apparatus, rubbing between a rotating substrate and an annular part which is provided in an annular shape along a circumferential direction of a spin chuck at a lower position of the substrate.SOLUTION: A liquid processing apparatus comprises: a sound amplifying part provided in an annular part for applying a contact sound generated by contact between a substrate which is rotated while being held by a spin chuck, and the annular part; a vibration sensor which senses a solid propagation sound propagated in the annular part and outputs a sensing signal; and a detection section for detecting rubbing between the substrate and the annular part on the basis of the sensing signal. Since the solid propagation sound is unlikely to be attenuated even if a propagation distance is long, the sensing signal is accurately propagated to the vibration sensor. Thus, highly accurate detection can be performed.</p> |
