Ultrasound transducer, ultrasound probe and manufacturing method of ultrasound transducer

摘要

The purpose is to provide an ultrasound transducer and ultrasound probe without the complexity of the manufacturing process of the non-conductive acoustic matching layer while ensuring the electric conductive path. Pluralities of two-dimensionally arranged piezoelectrics are comprised in the ultrasound transducer. Electrodes are provided for each piezoelectric. Furthermore, the non-conductive acoustic matching layer with the first surface on the electrode side and the second surface on the opposite side of the first surface is comprised in the ultrasound transducer, and moreover, the electric conductive acoustic matching layer arranged on the second surface side of the non-conductive acoustic matching layer is comprised in the ultrasound transducer. Moreover, the substrate arranged on the opposite side of the non-conductive acoustic matching layer is arranged with respect to the electric conductive acoustic matching layer. The plurality of grooves penetrating the non-conductive acoustic matching layer, leading up to mid-way of the piezoelectrics of the first surface side or mid-way of the electric conductive acoustic matching layer of the second surface side is formed between the first surface and the second surface of the non-conductive acoustic matching layer. Moreover, the electrode and the substrate are electrically conducted via the groove.

主权项

1. An ultrasound transducer, comprising:
a plurality of two-dimensionally arranged piezoelectrics, electrodes arranged on the respective plurality of piezoelectrics, a non-conductive acoustic matching layer with a first surface on the electrode side and a second surface on the opposite side of the first surface, two-dimensionally arranged according to the piezoelectrics, a conductive acoustic matching layer arranged on the second surface side, and a substrate arranged on the opposite side of the non-conductive acoustic matching layer with respect to the conductive acoustic matching layer, wherein, a plurality of grooves are formed which penetrates the non-conductive acoustic matching layer between the first surface and the second surface, and extends into mid-way of the piezoelectrics of the first surface side or mid-way of the conductive acoustic matching layer of the second surface side, and the electrode and the substrate are electrically conducted via the grooves.