Simulated gas supply apparatus

摘要

A simulated gas supply apparatus includes a raw gas source group including a plurality of raw gas sources, a plurality of flow controller groups, each of which includes a plurality of flow controllers, a flow control system including the flow controller groups, a primary supply pipe for supplying a simulated gas to an evaluation device, a primary exhaust pipe for exhausting the simulated gas, a switching valve system including a plurality of switching valves so as to switch the simulated gas flow between the primary supply pipe and the primary exhaust pipe, and a controlling unit that controls the flow control system and the switching valve system.

主权项

1. A simulated gas supply apparatus, comprising:
a raw gas source group comprising a plurality of raw gas sources; a flow control system comprising a plurality of flow controller groups, each of which comprises a plurality of flow controllers, each of the flow controllers being provided for each of the raw gas sources so as to control flow rates of each of the raw gas sources; a primary supply pipe for supplying a simulated gas to an evaluation device, the simulated gas being supplied from each of the flow controller groups; a primary exhaust pipe for exhausting the simulated gas; a switching valve system comprising a plurality of switching valves, each of which is provided for each of the flow controller groups so as to switch the simulated gas flow between the primary supply pipe and the primary exhaust pipe; and a controlling unit that controls the flow control system and the switching valve system, wherein the controlling unit controls the flow control system and the switching valve system in such a way that each of the flow controller groups changes a flow rate of the simulated gas every time a first time is elapsed, each of the switching valves flows the simulated gas to the primary supply pipe every time the first time is elapsed, and maintains the simulated gas flow to the primary supply pipe during a second time shorter than the first time, the simulated gas is supplied sequentially from each of the flow controller groups to the primary supply pipe every time the second time is elapsed.