SAW device and method for post-seal frequency trimming

摘要

A surface acoustic wave (SAW) device includes a piezoelectric crystal substrate on which an acoustic channel is formed, at least one electro-mechanical transducer operatively associated with the acoustic channel, and an encapsulating casing having a cover spaced above the acoustic channel and thereby defining a sealed volume around the substrate. A mass deposition device within the casing is spaced between the acoustic channel and the cover, preferably as gold-coated heating wire spanning the acoustic channel and having ends that are connectable to an electric power source outside the casing. Stress and aging shifts can be induced after sealing of the cover. Tuning is achieved by evaporating metal molecules off the heated wire onto the acoustic channel as the frequency is monitored, until the mass loading of metal molecules on the transducer produces the target frequency.

主权项

1. A surface acoustic wave (SAW) device comprising: a piezoelectric crystal substrate; a working surface of the substrate capable of transmitting acoustic waves along an acoustic channel; at least one electro-mechanical transducer operatively associated with the working surface for inducing said waves to travel along said channel and for receiving said waves; an encapsulating casing having a cover spaced above the working surface and thereby defining a sealed volume filled with pressurized gas; and a molecular deposition device within the casing, above the acoustic channel; wherein the molecular deposition device is a wire spanning the acoustic channel below the cover and having ends that are conductively connected to activation terminals that can be electrically powered from outside the casing.