Noble Ruthenium compounds preparation method thereof and process for the thin films using the same,申请号KR20130121986-传众专利搜索

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发明名称	Noble Ruthenium compounds preparation method thereof and process for the thin films using the same
摘要	<p>본 발명은 하기 화학식 1의 루테늄 화합물 및 이의 제조 방법, 박막을 형성하는 방법에 관한 것으로, 하기 화학식 1의 루테늄 화합물은 열적 안정성이 우수하여 양질의 루테늄 박막을 형성할 수 있다. [화학식 1]</p>
申请公布号	KR101567548(B1)	申请公布日期	2015.11.10
申请号	KR20130121986	申请日期	2013.10.14
申请人		发明人
分类号	C07F15/00;C23C16/06	主分类号	C07F15/00
代理机构		代理人
主权项
地址

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