| 发明名称 | Elastic wave device | ||
| 摘要 | An elastic wave device includes a piezoelectric substrate and an interdigital transducer electrode. The piezoelectric substrate includes a principal surface with a groove tapered in lateral cross section. The interdigital transducer electrode is arranged on the principal surface such that at least one portion thereof is located in the groove. The interdigital transducer electrode is a laminate including a first conductive layer, a second conductive layer, and a diffusion-preventing layer located between the first conductive layer and the second conductive layer and made of an oxide or nitride of Ti or Cr. | ||
| 申请公布号 | US9184367(B2) | 申请公布日期 | 2015.11.10 |
| 申请号 | US201313798206 | 申请日期 | 2013.03.13 |
| 申请人 | Murata Manufacturing Co., Ltd. | 发明人 | Sakaguchi Kenji;Saijo Shin;Yamazaki Hisashi |
| 分类号 | H03H9/25;H01L41/047;H03H9/02;H03H9/145 | 主分类号 | H03H9/25 |
| 代理机构 | Keating & Bennett, LLP | 代理人 | Keating & Bennett, LLP |
| 主权项 | 1. An elastic wave device comprising: a piezoelectric substrate including a principal surface including a groove tapered in lateral cross section; and an interdigital transducer electrode arranged on the principal surface such that at least one portion thereof is located in the groove; wherein the interdigital transducer electrode includes a laminate including a first conductive layer, a second conductive layer, and a diffusion-preventing layer that is located between the first conductive layer and the second conductive layer and is made of an oxide or nitride of Ti or Cr. | ||
| 地址 | Kyoto JP | ||