Infrared sensor, heat sensing element, and heat sensing method using the same

摘要

An infrared sensor includes a heat sensing element in which a first electrode, a dielectric film, and a second electrode are sequentially laminated; and an electric charge detection device. The dielectric film represents antiferroelectricity and has a spontaneous polarization in a predetermined measurement environment. The electric charge detection device calculates an amount of relaxation current flowing by a change of the spontaneous polarization, and senses heat of the heat sensing element based on temperature dependence of the amount of relaxation current.

主权项

1. An infrared sensor comprising:
a heat sensing element in which a first electrode, a dielectric film, and a second electrode are sequentially laminated, the dielectric film having a property in which a phase transition between an antiferroelectric phase and a ferroelectric phase occurs, the antiferroelectric phase being a stable state, the ferroelectric phase being a metastable state, the dielectric film having a spontaneous polarization in a predetermined measurement environment; a portion adapted to calculate an amount of relaxation current flowing by a change of the spontaneous polarization with the phase transition from the ferroelectric phase to the antiferroelectric phase in the dielectric film; and a portion adapted to sense heat based on a temperature dependence of the amount of relaxation current.