MEMS microphone with low pressure region between diaphragm and counter electrode

摘要

A MEMS microphone includes a first diaphragm element, a counter electrode element, and a low pressure region between the first diaphragm element and the counter electrode element. The low pressure region has a pressure less than an ambient pressure.

主权项

1. A MEMS microphone comprising:
a first diaphragm element; a second diaphragm element spaced apart from the first diaphragm element; a low pressure region between the first diaphragm element and the second diaphragm element, the low pressure region having a pressure less than an ambient pressure; a first counter electrode element disposed within the low pressure region; and a second counter electrode element spaced apart from the first counter electrode element and disposed within the low pressure region.