| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized physical quantity sensor that secures amplitude displacement amount of mass sections and has high detection sensitivity. <P>SOLUTION: The physical quantity sensor 1 includes: a sensor surface 3 on a board 2; two mass sections 4 arranged horizontally in a first axis direction of the sensor surface 3; rotary axes 8 which are provided in the two mass sections 4 and extend in a second axis (Y-axis) direction vertical to a first axis (X-axis) on the sensor surface 3; a drive section 5 for rotationally vibrating the two mass sections 4 around the rotary axes 8 in opposite phases using a first frequency; a force transmission section 6 for transmitting force received from each of the two mass sections 4; and a detection section 7 which is provided in the force transmission section 6 to detect displacement amount according to the transmitted force as an electric signal. In the physical quantity sensor 1, Coriolis force generated in the mass sections 4 according to the angular velocity around a third axis vertical to the sensor surface 3 is detected in the detection section 7. <P>COPYRIGHT: (C)2013,JPO&INPIT |
