| 发明名称 | Imaging optical system and illumination optical system | ||
| 摘要 | An imaging optical system has a plurality of mirrors, which image an object field in an object plane into an image field in an image plane. A reflection face of at least one of the mirrors is configured as a free form face which cannot be described by a rotationally symmetrical function. The object field has an aspect ratio greater than 1. A ratio of a minimal and a maximal transverse dimension of the object field can be less than 0.9. | ||
| 申请公布号 | US9182578(B2) | 申请公布日期 | 2015.11.10 |
| 申请号 | US201113326516 | 申请日期 | 2011.12.15 |
| 申请人 | Carl Zeiss SMT GmbH | 发明人 | Mann Hans-Juergen;Zellner Johannes;Dodoc Aurelian;Pretorius Marco;Menke Christoph;Ulrich Wilhelm;Endres Martin |
| 分类号 | G03B27/42;G02B17/06;G02B27/09;G03F7/20 | 主分类号 | G03B27/42 |
| 代理机构 | Fish & Richardson P.C. | 代理人 | Fish & Richardson P.C. |
| 主权项 | 1. An imaging optical system, comprising: a plurality of mirrors configured to image an object field in an object plane into an image field in an image plane, wherein: a reflection face of at least one of the plurality of mirrors is a free form face which cannot be described by a rotationally symmetrical function;the object field has a longitudinal dimension and a transverse dimension;the longitudinal dimension is greater than the transverse dimension;a ratio of a minimal transverse dimension of the object field and a maximum transverse dimension of the object field is less than 0.9. | ||
| 地址 | Oberkochen DE | ||