Solution and process for activating the surface of a semiconductor substrate

摘要

A solution and a process are used for activating the surface of a substrate comprising at least one area formed from a polymer, for the purpose of subsequently covering it with a metallic layer deposited via an electroless process. The composition contains: A) an activator formed from one or more palladium complexes; B) a binder formed from one or more organic compounds chosen from compounds comprising at least two glycidyl functions and at least two isocyanate functions; and C) a solvent system formed from one or more solvents capable of dissolving said activator and said binder. The solution and process may be applied for the manufacture of electronic devices such as integrated circuits, especially in three dimensions.

主权项

1. Solution for activating the surface of a substrate for the purpose of its subsequent covering with a metal layer deposited via an electroless route, said surface consisting exclusively of a polymer or comprising at least one area formed from a polymer and at least one area formed from an oxide,wherein the solution comprises:
A) an activator formed from one or more palladium complex(es) selected from the group consisting of: palladium complexes of formula (I)in which:
R1 and R2 are identical and represent H; CH2CH2NH2; CH2CH2OH;or R1 represents H and R2 represents CH2CH2NH2;or R1 represents CH2CH2NH2 and R2 represents CH2CH2NHCH2CH2NH2;or R1 represents H and R2 represents CH2CH2NHCH2CH2NHCH2CH2NH2;
X represents a ligand selected from the group consisting of Cl−; Br−; I−; H2O, NO3−; CH3SO3−; CF3SO3−; CH3-Ph-SO3− and CH3COO−; and palladium complexes of formula IIa or IIbin which:
R1 and R2 are as defined above and Y represents a counterion comprising two negative charges formed:
either from two monoanions;or from a dianion; B) a binder formed from one or more organic compounds selected from the group consisting of compounds comprising at least two glycidyl functions and compounds comprising at least two isocyanate functions; and C) a solvent system formed from one or more solvents capable of dissolving said activator and said binder.