| 摘要 |
An inertial drive actuator includes a shift unit that generates a small shift in a first direction and in a second direction opposite to the first direction, a vibration base plate that moves to and fro with the small shift of the shift unit, and a mover disposed on a flat surface of the vibration base plate and having a first magnetic field generating unit. The mover has a first yoke that guides magnetic flux generated by the first magnetic field generating unit in such a way that the magnetic flux generated by the first magnetic field generating unit concentrates on a surface of the mover facing the vibration base plate with respect to both S and N poles. The inertial drive actuator further comprises a second yoke provided on a side of the vibration base plate facing away from the mover. The frictional force acting between the mover and the vibration base plate is controlled by controlling a magnetic field generated by the first magnetic field generating unit to drive the mover. |
