| 摘要 |
FIELD: nanotechnologies.SUBSTANCE: invention relates to nanotechnology and can be used in engineering, medicine and power applications. The device for producing of carbon nanotubes contains a reaction chamber 12 which accommodates the substrate holder 1, the heater 2, the substrate 3, the inlet window 6, the target 8 holder 9, the branch pipe 11 for injection of gases of reactionary gas mix supply system and the branch pipe 10 of the vacuum-pumping system. After vacuum pumping of the chamber 12 the target 8 made of the catalyst material is effected by the pulse laser radiation of the additional source therefore on the substrate 3 the catalytic layer is deposited in the form of separate drops 4. Through the branch pipe 11 the gas mix is injected. Then on the obtained catalytic layer the main source laser radiation 13 is focused and the named layer is scanner by a scanner along the pre-set trajectory for growth of nanotubes 7 according to the pre-set picture. The laser radiation with the wavelength 0.248-10.6 mcm is used.EFFECT: inventions provide high performance, minimising of amount of necessary processing equipment and costs.4 cl, 3 dwg, 2 ex |
