Liquid-discharging device with observation optical system

摘要

In a liquid discharging device, an objective optical system is moved in the optical axis direction by a focus position adjusting mechanism to perform a first focusing action relative to the tip of a liquid discharging nozzle or a mirror image thereof and a second focusing action relative to the surface of a substrate facing the liquid discharging nozzle, the distance between the nozzle tip and the surface of the substrate is calculated on the basis of the resulting focus positions, and the position of the liquid discharging nozzle is adjusted by nozzle position adjusting mechanism so that the gap is appropriate. According to this configuration, the distance between the nozzle tip and the surface of the substrate can be precisely calculated and an optical unit for observation can be focused on the surface of the substrate.

主权项

1. A liquid-discharging device with an observation optical system comprising:
a liquid-discharging mechanism having a nozzle configured to discharge a liquid material; an objective optical a system configured to observe, in magnification, a discharge target disposed opposite a tip of the nozzle; display means for displaying an optical image obtained by the objective optical system; a focal point position adjustment mechanism configured to adjust a focal point position of the objective optical system; a nozzle position adjustment mechanism configured to move, along at least a direction of an optical axis of the objective optical system, the nozzle relative to the objective optical system; and a control unit configured to control the liquid-discharging mechanism, the focal point position adjustment mechanism, and the nozzle position adjustment mechanism; the control unit programmed to perform a first focusing action aligning focal point position of the objective optical system to the tip of the nozzle or a mirror image thereof and a second focusing action aligning the focal point position of the objective optical system to a surface of the discharge target, and calculating a distance between the tip of the nozzle and the surface of the discharge target on the basis of results of implementing the first and second focusing actions.