Optical surface scanning systems and methods

摘要

An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.

主权项

1. An optical scanning system, comprising:
a light source configured to provide light towards a sample, wherein the light source provides the light to the sample with a moving optical beam spot; a spectrometer configured to collect light reflected from the sample; and a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer, wherein the moving sample positioning stage rotates the sample in at least one direction while reflected light is being collected during the optical measurement of the sample; wherein the moving optical beam spot is rotated synchronously with the sample while reflected light is being collected during the optical measurement such that the moving optical beam spot rotates as the sample rotates and the moving optical beam spot illuminates a specific location on the sample during the optical measurement; and wherein the spectrometer collects reflected light data from the sample during the optical measurement.