| 发明名称 | Electromechanical transducer | ||
| 摘要 | When the initial displacement greatly varies among cells in an element, there is a need to reduce a bias voltage to be applied between electrodes. This decreases the sensitivity. An electromechanical transducer of the present invention includes an element having a plurality of cells. Each of the cells includes a first electrode and a second electrode that are provided with a cavity being disposed therebetween. A groove is provided at a position at a predetermined distance from the cavity of the cell on the outermost periphery of the element. | ||
| 申请公布号 | US9180489(B2) | 申请公布日期 | 2015.11.10 |
| 申请号 | US201414445945 | 申请日期 | 2014.07.29 |
| 申请人 | Canon Kabushiki Kaisha | 发明人 | Zaitsu Yoshitaka;Kawasaki Takehiko |
| 分类号 | H01L21/32;B06B1/02 | 主分类号 | H01L21/32 |
| 代理机构 | Canon U.S.A., Inc. IP Division | 代理人 | Canon U.S.A., Inc. IP Division |
| 主权项 | 1. An electromechanical transducer comprising an element including a plurality of cells, the cells each including a first electrode, and a second electrode provided with a cavity being disposed between the first electrode and the second electrode, wherein a groove is provided so as to surround an outer side of the cells on outermost periphery of the element, and wherein a width of the groove is 10 percent or more of the distance between the cavities of the cells included in the element. | ||
| 地址 | Tokyo JP | ||