Lithographic apparatus and lithographic projection method

摘要

A lithographic apparatus, includes an illumination system configured to condition a radiation beam, a first support constructed to support a first patterning device and a second support to support a second patterning device, the first and second patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate table constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate. The first support and second support are movable in a scanning direction and in a second direction substantially perpendicular to the scanning direction. By movement of the first support and second support in the second direction the first support and second support can selectively be aligned with the projection system.

主权项

1. A lithographic apparatus comprising:
an illumination system configured to condition a radiation beam; a first support constructed to support a first patterning device and a second support constructed to support a second patterning device, the first patterning device and second patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the first support and second support are movable in a scanning direction over a scanning distance of at least a length of the first patterning device or second patterning device in the scanning direction, wherein the first support and second support are movable in a second direction substantially perpendicular to the scanning direction over a distance of at least a width of the first patterning device or second patterning device in the second direction, wherein the lithographic apparatus is constructed to selectively align the first support or second support with the projection system by movement of the first support and/or second support in the second direction, wherein the first support and second support comprise a single actuator, a set of actuators or an actuator body or both a set of actuators and an actuator body to move the first support and the second support simultaneously in the second direction, and wherein the first and second supports are independently movable from each other so that during movement of one of the first support and the second support in the scanning direction, the other one of the first support and the second support is movable in another direction that is different from the scanning direction.