Large-area transmissive type optical image modulator and method of manufacturing the same and optical apparatus including transmissive type optical image modulator

摘要

A large-area transmissive type optical image modulator, a method of manufacturing the same, and an optical apparatus including the transmissive type optical image modulator are provided. The large-area transmissive type optical image modulator includes: a base substrate; a first expitaxial layer formed on the base substrate; a second expitaxial layer formed on the first expitaxial layer; a first electrode formed on the first expitaxial layer and spaced apart from the second expitaxial layer; a second electrode formed on the second expitaxial layer; and a transparent substrate covering the second expitaxial layer and the second electrode, wherein the base substrate includes a through hole corresponding to a light emitting area, and the first expitaxial layer may include an n-type or p-type doping material.

主权项

1. A transmissive type optical image modulator comprising:
a base substrate; a first epitaxial layer formed on the base substrate; a plurality of second epitaxial stacks formed on the first epitaxial layer, wherein each of the plurality of second epitaxial stacks is separated from a neighboring one of the plurality of second epitaxial stacks by a trench disposed therebetween; a plurality of first electrodes formed on the first epitaxial layer and spaced apart from the plurality of second epitaxial stacks; a plurality of second electrodes, each formed on a respective one of the plurality of second epitaxial stacks; and a transparent substrate covering the plurality of second epitaxial stacks and the plurality of second electrodes, wherein the base substrate comprises a through hole corresponding to a light emitting area, and the first epitaxial layer is a continuous layer which corresponds to the plurality of second epitaxial stacks formed thereon, and wherein the first epitaxial layer comprises a top surface exposed by the plurality of second epitaxial stacks.