Method of controlling orientation of domains in block copolymer films

摘要

A method of orienting microphase-separated domains is disclosed, comprising applying a composition comprising an orientation control component, and a block copolymer assembly component comprising a block copolymer having at least two microphase-separated domains in which the orientation control component is substantially immiscible with the block copolymer assembly component upon forming a film; and forming a compositionally vertically segregated film on the surface of the substrate from the composition. The orientation control component and block copolymer segregate during film forming to form the compositionally vertically-segregated film on the surface of a substrate, where the orientation control component is enriched adjacent to the surface of the compositionally segregated film adjacent to the surface of the substrate, and the block copolymer assembly is enriched at an air-surface interface.

主权项

1. A composition comprising:
a block copolymer assembly component comprising a diblock copolymer or triblock copolymer of styrene and methyl methacrylate; an orientation control component comprising radically polymerized epoxy-containing monomers selected from the group consisting of 2,3-epoxycyclohexyl (meth)acrylate, (2,3-epoxycyclohexyl)methyl (meth)acrylate, 5,6-epoxynorbornene (meth)acrylate, epoxydicyclopentadienyl (meth)acrylate, and a combination comprising at least one of the foregoing; and a solvent in which both the orientation control component and block copolymer assembly component are soluble; wherein the orientation control component is configured to segregate from the block copolymer assembly component upon forming a film from the composition and become enriched at a surface of the substrate and induce the block copolymer domains to orient perpendicular to a plane of the substrate to form an oriented domain pattern, wherein the orientation control component is segregated from the block copolymer assembly component upon forming a film from the composition, and the orientation control component has an affinity for a surface of a substrate that is greater than the block copolymer assembly component's affinity for the surface of the substrate, such that the orientation control component is enriched at the surface of the substrate upon forming the film.