| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processing apparatus which inhibits ozone from being generated by plasma contacting with atmospheric air even if the plasma is placed in contact with a surface of a processed material under the atmosphere, and to provide a processing method of the plasma processing apparatus.SOLUTION: A plasma processing apparatus 1 includes: an electrode 10 which applies a voltage to an area between itself and a processed material W to generate plasma in the area; and a cover 20 which covers the plasma P formed between the electrode 10 and the processed material W, the cover 20 in which an opening 21 from which the plasma is discharged is formed at the processed material side. In the cover 20, a guide 23, which guides a part of the plasma P to the electrode side so that the part of the plasma P flowing from the electrode 10 to the opening 21 circulates in the cover 20, is formed toward the inner side of the opening 21 along a periphery of the opening 21. |
