| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for detecting a defect in an insulating film in which it is possible to detect even a spot that may become a defect under a drive condition, the insulation film that was difficult to detect by a conventional optical detection method.SOLUTION: The method is characterized by including a film placement step of placing an insulating film 12 on an inspection-use electrode 13, an electrode formation step of providing an electrode 14 on a side of the insulating film 12 on which the inspection-use electrode 13 is not placed, and a voltage application step of applying a voltage between the inspection-use electrode 13 and the electrode 14 provided on the insulating film 12, the presence of a defect in the insulating film 12 being determined by monitoring a discharge current between the electrodes. |
