发明名称 SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD
摘要 PROBLEM TO BE SOLVED: To perform a super resolution observation of an unstained sample.SOLUTION: One embodiment of super-resolution observation devices exemplified by the present invention comprises: an illumination optical system that converges first illumination light of an optical frequency ωand second illumination light of optical frequency ωto an area of an observation object surface; a modulation unit that modulates a characteristic of the first illumination light heading for the area by a modulation frequency f; and an extraction unit that extracts a component of the optical frequency ωor ωin which the characteristic varies by a frequency higher than the modulation frequency ffrom light generated in the area in responce to the first illumination light and the second illumination light.
申请公布号 JP2015197606(A) 申请公布日期 2015.11.09
申请号 JP20140075615 申请日期 2014.04.01
申请人 NIKON CORP 发明人 TAKE FUMIHIRO;YAZAWA HIRONORI
分类号 G02B21/06;G01N21/27;G02B21/36 主分类号 G02B21/06
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