发明名称 |
SUPER-RESOLUTION OBSERVATION DEVICE AND SUPER-RESOLUTION OBSERVATION METHOD |
摘要 |
PROBLEM TO BE SOLVED: To perform a super resolution observation of an unstained sample.SOLUTION: One embodiment of super-resolution observation devices exemplified by the present invention comprises: an illumination optical system that converges first illumination light of an optical frequency ωand second illumination light of optical frequency ωto an area of an observation object surface; a modulation unit that modulates a characteristic of the first illumination light heading for the area by a modulation frequency f; and an extraction unit that extracts a component of the optical frequency ωor ωin which the characteristic varies by a frequency higher than the modulation frequency ffrom light generated in the area in responce to the first illumination light and the second illumination light. |
申请公布号 |
JP2015197606(A) |
申请公布日期 |
2015.11.09 |
申请号 |
JP20140075615 |
申请日期 |
2014.04.01 |
申请人 |
NIKON CORP |
发明人 |
TAKE FUMIHIRO;YAZAWA HIRONORI |
分类号 |
G02B21/06;G01N21/27;G02B21/36 |
主分类号 |
G02B21/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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