| 摘要 |
PROBLEM TO BE SOLVED: To continuously measure a plurality of trace gas components in a sample gas in a short time cycle.SOLUTION: A sample gas, and a gas obtained by removing a specific gas with an overlapped fragment in the sample gas using an absorbent are compared and measured using a mass spectrometer, and preferably, only a specific component in the sample gas with a plurality of fragments overlapped is compensated for using a specific component measurement unit. |
