发明名称 SEMICONDUCTOR WAFER
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor wafer on which many kinds of chips are mounted and by which different kinds of chips having the same chip size can be identified easily.SOLUTION: An exclusion region 7 is formed at an outer periphery of a semiconductor wafer, and the inside of the exclusion region 7 is sectionalized into regions A, B, C, and D of different kinds. The regions A, B, C, and D are sectioned by boundaries 22, 23, and 24. In the vicinity of both ends of the boundaries 21, 22, 23, and 24, mark chips 1, 2, 3, and 4 are arranged.
申请公布号 JP2015198150(A) 申请公布日期 2015.11.09
申请号 JP20140075029 申请日期 2014.04.01
申请人 SEIKO INSTRUMENTS INC 发明人 MATSUMOTO YASUNOBU;SUZUKI MASAKI;ASO MAKOTO;MORITA HIROSHI
分类号 H01L21/02;H01L21/82 主分类号 H01L21/02
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