| 摘要 |
PROBLEM TO BE SOLVED: To provide a radiation-sensitive resin composition excellent in LWR performance, CDU performance, resolution, rectangularity of a cross-sectional shape, depth of focus, exposure latitude, and MEEF performance.SOLUTION: The radiation-sensitive resin composition comprises a polymer having a first structural unit including a partial structure represented by formula (1) below, and a radiation-sensitive acid generator. In formula (1), a and b each independently represent an integer of 0 to 5, where a+b is 1 or more. |
