| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance robot equipped with eight robot arms that allows the eight robot arms to be individually driven and allows conveyed articles (substrates or wafers) to be stacked vertically at a constant pitch unit to be simultaneously loaded and unloaded.SOLUTION: A conveyance robot 100 equipped with eight robot arms has a post 140 to which arm units are jointed to be movable vertically and linearly, where the arm units are constituted of first-fourth robot arm pairs that are jointed to upper and lower parts of both sides of the post. The first-fourth robot arm pairs, in which the pair is formed by jointing two robot arms horizontally, are constituted of first-eighth robot arms. The robot can achieve unloading, conveyance or loading at the same position, simultaneously convey many conveyed articles, and reduce TACT TIME. |
