| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device capable of inspecting a plurality of feature amounts with good productivity.SOLUTION: A surface inspection device includes: an imaging device 12 which has a color filter 27 for separating first light 16 of a first wavelength, second light 18 of a second wavelength, and third light 23 of a third wavelength, and photographs an image of a substrate 6; a vertical illumination device 14 for irradiating the substrate 6 with the first light 16 along a first direction 17 that an imaging device 12 photographs; a first oblique illumination device 9 for irradiating the substrate 6 with the second light 18 from a second direction 21 crossing the first direction 17 at a first angle 22; a second oblique illumination device 8 for irradiating the substrate 6 with the third light 23 from a third direction 24 crossing the first direction 17 at a second angle 25 larger than the first angle 22; and image calculation part for calculating a feature amount of the image. |
