| 摘要 |
PROBLEM TO BE SOLVED: To provide a peeling device of a plate-like body capable of effectively peeling the plate-like body from a plate-like body holding member and a method thereof, and a method of manufacturing the plate-like body.SOLUTION: In a first peeling process, a fluid 16 is injected from a nozzle 14 and an edge portion G3 of a glass plate G is peeled from a holding surface 12 of an adsorption sheet 10. An injection direction of the fluid 16 is a direction pointed to a holding surface 12A at a position separated from a boundary portion 22 between the holding surface 12 and the edge portion G3, and is set to a direction intersecting the holding surface 12. In a second peeling process, the injection of the fluid 16 is stopped first. Then fluid 20 is injected from a nozzle 18 and the entire glass plate G is peeled from the holding surface 12. An injection direction of the fluid 20 is a direction pointed to a boundary face 24 between the holding surface 12 and the glass plate G, and is set to a direction parallel to the holding surface 12. |
