| 摘要 |
PROBLEM TO BE SOLVED: To develop an imprint device of simple structure, capable of preventing occurrence of uncured liquid of photo-curing resin.SOLUTION: An imprint device has a press roller 22, a light-emitting device 21, and a mounting table 7. The mounting table 7 has a space formation member 31 attached to the sidewall 33 of the body 30, in which a groove 35 is formed. The side 60 of a mold 41 on the head side in the direction of travel is within a substantially closed space 50 surrounded by the sidewall 33 of the body 30, the bottom surface 37 of the space formation member 31, the vertical wall 38 of the space formation member 31, and the lower surface of a glass substrate 43. Interior of the substantially closed space 50 is locally nitrogen atmosphere, and the oxygen concentration is low. Consequently, even a photo-curing resin 61(45) pushed out and protruded receives irradiation of an ultraviolet ray and is cured. |
