发明名称 ABNORMALITY DETERMINATION DEVICE AND ABNORMALITY DETERMINATION METHOD
摘要 PROBLEM TO BE SOLVED: To provide an abnormality determination device capable of determining whether or not a thermal flow sensor has an abnormality caused by dirt or the like.SOLUTION: An abnormality determination device 1 comprises: a thermal flow sensor 16 that is placed in a pipe 12 through which a measurement target fluid flows and measures a first flow rate of the measurement target fluid; a vortex flowmeter 20 that is placed in the pipe 12 and measures a second flow rate of the measurement target fluid; a flow rate comparison unit that performs the comparison between the measured first flow rate and the measured second flow rate; and an abnormality determination unit that determines whether or not the thermal flow sensor 16 has an abnormality on the basis of the results of the comparison.
申请公布号 JP2015197324(A) 申请公布日期 2015.11.09
申请号 JP20140074306 申请日期 2014.03.31
申请人 AZBIL CORP 发明人 MATSUDA JUNICHI
分类号 G01F1/68;G01F1/32;G01F1/684 主分类号 G01F1/68
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